18.2
What happens to ESDS (Electrostatic Sensitive Devices) in case of direct ESD from plastics?
What happens to ESDS (Electrostatic Sensitive Devices) in case of direct ESD from plastics?
Thursday, November 5, 2015: 10:50 AM
Meeting Room D137 & 138 (Oregon Convention Center )
Summary:
Non antistatic plastics are used in many tools for preassembly and assembly manufacturing. Process yield drops in these steps are most frequently root-caused by machinery ESD. Failure analysts and process engineers are in heavy discussion about device-ESD-risks by direct arcing from charged plastic materials. The paper helps both failure analysts and process engineers to understand what happens physically in these cases and how real ESD damage risks can be evaluated.
Non antistatic plastics are used in many tools for preassembly and assembly manufacturing. Process yield drops in these steps are most frequently root-caused by machinery ESD. Failure analysts and process engineers are in heavy discussion about device-ESD-risks by direct arcing from charged plastic materials. The paper helps both failure analysts and process engineers to understand what happens physically in these cases and how real ESD damage risks can be evaluated.