16.3
Nanoprobing Applications with Capacitance-Voltage (C-V) and Pulsed Current-Voltage (PI-V) Measurements for Device Failure Analysis
Nanoprobing Applications with Capacitance-Voltage (C-V) and Pulsed Current-Voltage (PI-V) Measurements for Device Failure Analysis
Thursday, November 5, 2015: 8:50 AM
Meeting Room D139 & 140 (Oregon Convention Center )
Summary:
Nanoprobing applications for electrical analysis at nanoscalehave been under development for over a decade.The DC current-voltage (I-V) measurement is usuallythe most popular test from the beginning. The DC instrumentation and operation have evolved into a mature standard in thefailure analysis field. Recently, beyond DC I-V tests, Nanoprober suppliers are providing advanced non-DC test capabilities such as CV and pulsed I-Vmeasurements. For the non-DC tests, the tool operation and data interpretation can be more challenging. Furthermore, the applications to fault isolationwould be more complicated and not as straightforward as DC tests. The applications of C-V and PI-V are relatively new topics in the advanced semiconductor failure analysis (FA). The FA community should be very interested in learning how toimprove the system capability of the advancedanalysis, and more importantly, how to exploit these techniques to help more real FA cases in their daily work.
Nanoprobing applications for electrical analysis at nanoscalehave been under development for over a decade.The DC current-voltage (I-V) measurement is usuallythe most popular test from the beginning. The DC instrumentation and operation have evolved into a mature standard in thefailure analysis field. Recently, beyond DC I-V tests, Nanoprober suppliers are providing advanced non-DC test capabilities such as CV and pulsed I-Vmeasurements. For the non-DC tests, the tool operation and data interpretation can be more challenging. Furthermore, the applications to fault isolationwould be more complicated and not as straightforward as DC tests. The applications of C-V and PI-V are relatively new topics in the advanced semiconductor failure analysis (FA). The FA community should be very interested in learning how toimprove the system capability of the advancedanalysis, and more importantly, how to exploit these techniques to help more real FA cases in their daily work.