34.4
Observation of polarization and two dimensional electron gas in AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy
Observation of polarization and two dimensional electron gas in AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy
Wednesday, November 4, 2015
Exhibit Hall D (Oregon Convention Center )
Summary:
We measured AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy (SNDM) which can measure both carrier and polarization profile in AlGaN/GaN heterostructure. As a result, GaN spontaneous polarization and AlGaN polarization which is sum of spontaneous polarization and piezoelectric polarization were clearly distinguished. Two dimensional electron gas (2DEG) was observed at the AlGaN/GaN interface. This results show that SNDM is useful method for evaluation of 2DEG profile and polarization profile in AlGaN/GaN heterostructure.
We measured AlGaN/GaN heterostructure using scanning nonlinear dielectric microscopy (SNDM) which can measure both carrier and polarization profile in AlGaN/GaN heterostructure. As a result, GaN spontaneous polarization and AlGaN polarization which is sum of spontaneous polarization and piezoelectric polarization were clearly distinguished. Two dimensional electron gas (2DEG) was observed at the AlGaN/GaN interface. This results show that SNDM is useful method for evaluation of 2DEG profile and polarization profile in AlGaN/GaN heterostructure.