13.1
Tester Assisted Multiple Emission Microscopy

Wednesday, November 4, 2015: 3:30 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Dr. Christian Hollerith , Infineon tech. AG, Neubiberg, Germany
Mr. Gerhard Borgmann , Infineon tech. AG, Neubiberg, Germany
Wolfgang Schaller , Infineon tech. AG, Neubiberg, Germany
Christof Brillert , Infineon tech. AG, Neubiberg, Germany
Mr. Christian Burmer , Infineon tech. AG, Neubiberg, Germany

Summary:

Multiple emission microscopy can be used to obtain a complete overview of device emission during IDDQ-test. In the new approach an emission microscopy image is taken for each pattern of the IDDQ-test. Then the large amount of images is analyzed for correlation with IDDQ current levels. So for each increased current level concurrent spots can be identified and further analyzed
See more of: Diagnostic Testing, Scanning and Debug
See more of: Technical Program