19.1
A Simple Method to Fabricate a Tunable In-Situ SIL

Thursday, November 5, 2015: 10:25 AM
Meeting Room D139 & 140 (Oregon Convention Center )
Mr. Mark Kimball , Maxim Integrated, Hillsboro, OR

Summary:

The SIL (Solid Immersion Lens) has become an indispensible FA tool. While other methods have been described to fabricate SILs, they have limitations due to efficiency or size. The method presented here gives another way to make in-situ SIL lenses, using equipment that is commonly available in the modern FA lab. The SIL can be adjusted for samples of different thicknesses.