Ms. Ching-Shan Sung
Ms. Ching-Shan Sung
team Leader
Inotera Memories, Inc.
Physical Failure Analysis Department
Hwa-Ya Technology Park 667, Fuhsing 3rd Rd., Kueishan
Taoyuan
Taiwan
33383
Papers:
33.1
TEM sample preparation tricks for Advanced DRAMs
34.1
Case Study: Doping Profile Analysis for 30nm DRAM Devices Using SCM and SSRM