41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015): http://www.asminternational.org/web/ISTFA-2015/home

41st International Symposium for Testing and Failure Analysis (November 1 - 5, 2015)
November 01 - 05, 2015

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Sinjin Dixon-Warren

Chipworks Inc.
Ottawa, ON
Canada K2H 5B7

Papers:
3.2 Extending Electrical Scanning Probe Microscopy Measurements of Semiconductor Devices using Microwave Impedance Microscopy 16.2 Plasma FIB DualBeam™ Delayering for Atomic Force nanoProbing™ of 14 nm FinFET Devices in an SRAM Array

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General Information

November 01 - 05, 2015


Portland, OR