Enhanced Localization of Non Linear Defects in Sub 14nm BEOL Structures
Enhanced Localization of Non Linear Defects in Sub 14nm BEOL Structures
Monday, November 7, 2016: 12:35 PM
113 (Fort Worth Convention Center)
Summary:
The paper introduces a new, novel technique of localization at level non linear defects in sub 14nm structures not possible with legacy FIB voltage contrast, SEM voltage contrast or EBAC methods
The paper introduces a new, novel technique of localization at level non linear defects in sub 14nm structures not possible with legacy FIB voltage contrast, SEM voltage contrast or EBAC methods