Automated 3D EDS for Spatially Resolved Elemental Characterization of Semiconductors
Automated 3D EDS for Spatially Resolved Elemental Characterization of Semiconductors
Wednesday, November 9, 2016: 3:30 PM
110AB (Fort Worth Convention Center)
Summary:
Characterization a materials 3D elemental distribution is the next step for labs to pursue in gaining new information of materials and devices. This new 3D EDX system allows for automated data collection with subsequent 3D reconstruction and visualization of the HAADF STEM image along with the 3D EDX maps
Characterization a materials 3D elemental distribution is the next step for labs to pursue in gaining new information of materials and devices. This new 3D EDX system allows for automated data collection with subsequent 3D reconstruction and visualization of the HAADF STEM image along with the 3D EDX maps