Automated 3D EDS for Spatially Resolved Elemental Characterization of Semiconductors

Wednesday, November 9, 2016: 3:30 PM
110AB (Fort Worth Convention Center)
Mr. Kevin McIlwrath , JEOL USA, Inc, Peabody, MA

Summary:

Characterization a materials 3D elemental distribution is the next step for labs to pursue in gaining new information of materials and devices. This new 3D EDX system allows for automated data collection with subsequent 3D reconstruction and visualization of the HAADF STEM image along with the 3D EDX maps
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