Conductive Thin Film Fail Detection in 20 nm and 14nm technologies

Wednesday, November 9, 2016: 3:55 PM
108 (Fort Worth Convention Center)
Mr. Satish Kodali , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Chuan Zhang , GLOBALFOUNDRIES Inc., Malta, NY
Ms. Tanya Schaeffer , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Sreenath Arva , GLOBALFOUNDRIES Inc., Malta, NY
Donald Nedeau , GLOBALFOUNDRIES Inc., Malta, NY
Jian Yu , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Yinzhe Ma , GLOBALFOUNDRIES Inc., Malta, NY
Tarun Vijay , GLOBALFOUNDRIES Inc., Malta, NY
Karthik Kalaiazhagan , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Felix Beaudoin , GLOBALFOUNDRIES Inc., Malta, NY