Case Studies and FA Process III

Wednesday, November 9, 2016: 3:30 PM-6:00 PM
108 (Fort Worth Convention Center)
Chairs:  Dr. Yan Li, Intel, Chandler, AZ
Co-chairs:  Mr. Apek Mulay, Mulay's Consultancy Services, Tustin, CA and Ms. Jaya Chowdhury, Chem Trace, Fremont, CA
3:30 PM
INVITED TALK: In-Situ and progressive FA process for root cause investigation
Dr. Yan Li, Intel
3:55 PM
Conductive Thin Film Fail Detection in 20 nm and 14nm technologies
Mr. Satish Kodali, GLOBALFOUNDRIES Inc.; Dr. Chuan Zhang, GLOBALFOUNDRIES Inc.; Ms. Tanya Schaeffer, GLOBALFOUNDRIES Inc.; Mr. Sreenath Arva, GLOBALFOUNDRIES Inc.; Donald Nedeau, GLOBALFOUNDRIES Inc.; Jian Yu, GLOBALFOUNDRIES Inc.; Mr. Yinzhe Ma, GLOBALFOUNDRIES Inc.; Tarun Vijay, GLOBALFOUNDRIES Inc.; Karthik Kalaiazhagan, GLOBALFOUNDRIES Inc.; Mr. Chong Khiam Oh, GLOBALFOUNDRIES Inc.; Dr. Felix Beaudoin, GLOBALFOUNDRIES Inc.
4:20 PM
Process Flow employed for Parametric Test Structure Chain Opens Fault Isolation in 20 nm and sub-20 nm technologies in high throughput Foundries
Mr. Satish Kodali, GLOBALFOUNDRIES Inc.; Mr. Yinzhe Ma, GLOBALFOUNDRIES Inc.; Dr. Wayne Zhao, GLOBALFOUNDRIES Inc.; Mr. Chong Khiam Oh, GLOBALFOUNDRIES Inc.; Dr. Felix Beaudoin, GLOBALFOUNDRIES Inc.
4:45 PM
Successful Identification of a Subtle Oxide Defect in Between Tungsten (W) plug and Titanium (Ti) liner in a Bipolar Transistor
Mr. Raymond G. Mendaros, Analog Devices General Trias (ADGT); Mr. Ricardo Calanog, Analog Devices General Trias (ADGT); Mr. Raghavendra Bawlady, Analog Devices Limerick Ireland (ADLK)
5:10 PM
Characterization of 14nm Silicon Integrated Circuits with 1.55 – 2um Emission Microscopy: A Case Study
Dr. Keith A. Serrels, GLOBALFOUNDRIES; Mr. Anoop Kalarikkal, GLOBALFOUNDRIES; Mr. Amit M. Jakati, GLOBALFOUNDRIES; Dr. Christian Schmidt, GLOBALFOUNDRIES; Mr. Greg Dabney, GLOBALFOUNDRIES
5:35 PM
The use of a Fresnel lens on an actual failure
Dr. Marc van Veenhuizen, NXP Semiconductors; Mr. Harry Kerver, NXP Semiconductors; Mrs. Lei Peters-Wu, NXP Semiconductors; Mr. Sukho Lee, NXP Semiconductors; Dr. Frank Zachariasse, NXP Semiconductors
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