Process Flow employed for Parametric Test Structure Chain Opens Fault Isolation in 20 nm and sub-20 nm technologies in high throughput Foundries

Wednesday, November 9, 2016: 4:20 PM
108 (Fort Worth Convention Center)
Mr. Satish Kodali , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Yinzhe Ma , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Wayne Zhao , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Felix Beaudoin , GLOBALFOUNDRIES Inc., Malta, NY

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