Plasma-FIB sample preparation for X-ray tomography of 3D-IC interconnects

Thursday, November 10, 2016: 8:25 AM
110AB (Fort Worth Convention Center)
Dr. Guillaume Audoit , CEA, LETI, MINATEC Campus, Grenoble Cedex 9, France
Mr. Guillaume Delpy , FEI Europe B.V., Eindhoven, Netherlands
Dr. Pierre Bleuet , CEA, LETI, MINATEC Campus, Grenoble Cedex 9, France
Mr. Laurens Kwakman , FEI Europe B.V., Eindhoven, Netherlands

Summary:

Prior to x-ray tomography, cylindrically-shaped samples are obtained using an innovative milling strategy on a Plasma-FIB. The method presented consists of tuning the ion dose as a function of pixel coordinates along with optimization of the scan geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency.
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