Sample chemical staining and latest generation SEM imaging – Characterizing process robustness in semiconductor manufacturing

Monday, November 7, 2016: 12:35 PM
108 (Fort Worth Convention Center)
Dr. Andreas Meyer , Globalfoundries Fab 1, Dresden, Germany
Dr. Eckhard Langer , Globalfoundries Fab 1, Dresden, Germany

See more of: Sample Preparation and Device Deprocessing
See more of: Technical Program