Studies on A Novel Qualification Method of the Silicon Nitride
Studies on A Novel Qualification Method of the Silicon Nitride
Wednesday, November 9, 2016
Summary:
In this paper, we will report a new method using a different solution (KOH) to identify the pinholes on the Si3N4 passivation layer on Silicon substrate successfully.
In this paper, we will report a new method using a different solution (KOH) to identify the pinholes on the Si3N4 passivation layer on Silicon substrate successfully.