Sample Preparation and Device Deprocessing - Poster

Wednesday, November 9, 2016: 1:30 PM-3:30 PM
Chairs:  Dr. Zhigang Song, Globalfoundries, Hopewell Junction, NY
Co-chairs:  Dr. Erwin Hendarto, LatticeGear, Beaverton, OR
Innovative Laser Process for Gel removal
Mr. G. B. Anderson, Infineon Technologies
Physical Failure Analysis (PFA) Techniques For Front-End-Of-Line (FEOL) Defect Analysis
Mr. Dirk Andrew Doyle, Maxim Integrated - Hillsboro; Mr. Fritz Christian Awitan, Maxim Integrated - Philippines; Lawrence Benedict, Maxim Integrated - Hillsboro
Studies on A Novel Qualification Method of the Silicon Nitride
Dr. Younan Hua, WinTech Nano-Technology Services Pte. Ltd.
Pulse Laser Ablation Techniques for IC Package Substrate Modifications and Validation
Mr. Matthew M. Mulholland, Intel Corporation; Ahmed A. Helmy, Intel Corporation; Anthony V. Dao, Intel Corporation
Decapsulation of IC Package by Atmospheric Microwave Plasma Needle
Dr. Martin Kral, Nippon Scientific Co., Ltd.; Dr. Masashi Kando, Plasma Applications Co., Ltd.; Dr. Marius Gabriel blajan, Plasma Applications Co., Ltd.; Mr. Yoichi Tsujita, Nippon Scientific Co., Ltd.; Mr. Satoshi Suzuki, Nippon Scientific Co., Ltd.; Mr. Yasutoshi Yamaichi, Nippon Scientific Co., Ltd.; Mr. Naoto Ohta, Nippon Scientific Co., Ltd.
MEMS Failure Analysis In Wafer Fabrication
Ms. Ng Hui Peng, GLOBALFOUNDRIES Singapore Pte Ltd; Mr. Ang Ghim Boon, GLOBALFOUNDRIES Singapore Pte Ltd; Ms. Angela Teo, GLOBALFOUNDRIES Singapore Pte Ltd; Quah Alfred, GLOBALFOUNDRIES Singapore Pte Ltd; Mr. Dayanand Nagalingam, GLOBALFOUNDRIES Singapore Pte Ltd; Dr. Xu Nai Yun, GLOBALFOUNDRIES Singapore Pte Ltd; Dr. Chen Changqing, GLOBALFOUNDRIES Singapore Pte Ltd; Dr. Mai Zhi Hong, GLOBALFOUNDRIES Singapore Pte Ltd; Dr. Jeffrey C. Lam, GLOBALFOUNDRIES Singapore Pte Ltd
IDENTIFICATION OF WET CHEMICAL DEPROCESSING INDUCED ARTIFACTS – A COMMON PROBLEM AFFECTING ALL MOS AND CMOS TECHNOLOGIES
Mr. Raymond G. Mendaros, Analog Devices General Trias (ADGT); Mr. Bernardino Mazon, Analog Devices Inc; Christian Renan Marquez, Analog Devices Inc
Locating Gate Oxide Failures Using KOH
Ms. Lori Sarnecki, ON Semiconductor
See more of: Technical Program