Failure Analysis Work Flow for Dislocation Identification and Characterization by Electron Channeling Contrast Imaging using SEM and FIB

Wednesday, November 9, 2016: 4:20 PM
110AB (Fort Worth Convention Center)
Dr. Yongkai Zhou , Carl Zeiss Microscopy GmbH, Singapore, Germany
Dr. Luyang Han , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Ingo Schulmeyer , Carl Zeiss Microscopy, Oberkochen, Germany

Summary:

This work presents a fast and cost effective method for dislocation identification and characterization in SEM and FIB using ECCI. A FA work flow of dislocation identification, site-specific lamella preparation at the target dislocation and STEM dislocation characterization is presented.
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