Elemental Characterisation of sub 20nm structures in devices using low energy SEM-EDS

Wednesday, November 9, 2016: 4:45 PM
110AB (Fort Worth Convention Center)
Dr. James T. Sagar , Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom
Dr. Connor McCarthy , Oxford Instruments Nanoscience, Abingdon, United Kingdom
Dr. Simon R. Burgess , Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom
Mr. Xiaobing Li , Oxford Instruments Nanoanalysis, High Wycombe, United Kingdom

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