Further Localization of the Minor Junction Leakage Fault by Nano-Probing

Monday, November 7, 2016: 1:25 PM
110AB (Fort Worth Convention Center)
Mr. Hung-Sen Wang , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
Mr. Chun-Chuan Lin , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
Mr. Tsai-Yi Sung , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
Mr. Kuo-Ching Chang , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
Mr. Shih-Chi Yang , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan
Mr. Wei-Shuo Hung , Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan

See more of: Nanoprobing and Electrical Characterization I
See more of: Technical Program