Charging reduction method for Auger analysis on imide surface
Charging reduction method for Auger analysis on imide surface
Wednesday, November 9, 2016
Summary:
All of the Auger tools have a common difficulty to analyze the insulator sample especially on imide surface. This scenario will become worst as not all the Auger tools have the capability to tilt up to more than 75° in order to get low angle incident beam prior to the analysis. With Auger JAMP-9500F as it enable to tilt up to 90°, makes the analysis on insulator and imide specifically is possible. The charging effect during Auger analysis on imide surface was successfully been eliminated using the combination approaches of low incident angle Auger electron with sample wrapping method. In addition, this method also enables the utilization of in-house Auger tool as alternative of XPS analysis at external lab.
All of the Auger tools have a common difficulty to analyze the insulator sample especially on imide surface. This scenario will become worst as not all the Auger tools have the capability to tilt up to more than 75° in order to get low angle incident beam prior to the analysis. With Auger JAMP-9500F as it enable to tilt up to 90°, makes the analysis on insulator and imide specifically is possible. The charging effect during Auger analysis on imide surface was successfully been eliminated using the combination approaches of low incident angle Auger electron with sample wrapping method. In addition, this method also enables the utilization of in-house Auger tool as alternative of XPS analysis at external lab.