Successful Identification of a Subtle Oxide Defect in Between Tungsten (W) plug and Titanium (Ti) liner in a Bipolar Transistor

Wednesday, November 9, 2016: 4:45 PM
108 (Fort Worth Convention Center)
Mr. Raymond G. Mendaros , Analog Devices General Trias (ADGT), Brgy. Javalera, Gen. Trias, Cavite, Philippines
Mr. Ricardo Calanog , Analog Devices General Trias (ADGT), Brgy. Javalera, Gen. Trias, Cavite, Philippines
Mr. Raghavendra Bawlady , Analog Devices Limerick Ireland (ADLK), Limerick, Ireland

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