Conductive-AFM for Scan Logic Failure Analysis at Advanced Technology Nodes
Conductive-AFM for Scan Logic Failure Analysis at Advanced Technology Nodes
Thursday, November 10, 2016: 1:45 PM
108 (Fort Worth Convention Center)
Summary:
Failure modes in leading-edge nodes are more and more challenging to capture with conventional FA techniques. This paper demonstrated CAFM technique as a powerful and efficient solution for scan logic failure analysis at advanced technology nodes.
Failure modes in leading-edge nodes are more and more challenging to capture with conventional FA techniques. This paper demonstrated CAFM technique as a powerful and efficient solution for scan logic failure analysis at advanced technology nodes.