Conductive-AFM for Scan Logic Failure Analysis at Advanced Technology Nodes

Thursday, November 10, 2016: 1:45 PM
108 (Fort Worth Convention Center)
Dr. Chuan Zhang , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY
Ms. Esther P.Y. Chen , GLOBALFOUNDRIES Inc., Malta, NY

Summary:

Failure modes in leading-edge nodes are more and more challenging to capture with conventional FA techniques. This paper demonstrated CAFM technique as a powerful and efficient solution for scan logic failure analysis at advanced technology nodes.
See more of: Scanning Probe Analysis II
See more of: Technical Program