Scanning Probe Analysis II

Thursday, November 10, 2016: 12:55 PM-2:20 PM

108 (Fort Worth Convention Center)

Chairs: Mrs. Rosalinda-Mendoza Ring, GlobalFoundries, Saratoga Springs, NY

Co-chairs: Mr. David L. Burgess, Accelerated Analysis, Half Moon Bay, CA

12:55 PM

Device Dielectric Quality analysis and Fault Isolation at the contact level by scanning Microwave Impedance Microscopy
Dr. Wei-Shan Hu, TSMC (Taiwan Semiconductor Manufacturing Company, Ltd.); Mr. Oskar Amster, PrimeNano, Inc.

1:20 PM

Combining Current Imaging, EBIC/EBAC, and Electrical Probing for fast and reliable in situ Electrical Fault Isolation
Dr. Stephan Kleindiek, Kleindiek Nanotechnik; Dr. Matthias Kemmler, Kleindiek Nanotechnik; Mr. Andreas Rummel, Kleindiek Nanotechnik; Mr. Klaus Schock, Kleindiek Nanotechnik

1:45 PM

Conductive-AFM for Scan Logic Failure Analysis at Advanced Technology Nodes
Dr. Chuan Zhang, GLOBALFOUNDRIES Inc.; Mr. Chong Khiam Oh, GLOBALFOUNDRIES Inc.; Ms. Esther P.Y. Chen, GLOBALFOUNDRIES Inc.

See more of: Technical Program