Diamond Probe Applications for Nanoprobing

Monday, November 7, 2016: 1:00 PM
110AB (Fort Worth Convention Center)
Ms. Sweta Pendyala , Globalfoundries, Hopewell Junction, NY
Mr. Andrew Dalton , Globalfoundries, Hopewell Junction, NY
Mr. Sean Zumwalt , FEI, Santa Barbara, CA
Mr. John Miller , FEI, Santa Barbara, CA

Summary:

This paper explores a novel approach to simplify a given circuit and localize the failing finger by cutting metal lines using diamond nanoprobes on the FEI Hyperion AFP. It also describes some other applications of diamond nanoprobes on semiconductor samples.