CF4-free Microwave Induced Plasma Decapsulation of Automotive Semiconductor Devices

Monday, November 7, 2016: 1:00 PM
108 (Fort Worth Convention Center)
Dr. Jiaqi Tang , JIACO Instruments B.V., Delft, Netherlands
Mr. G. B. Anderson , Infineon Technologies, Livonia, MI
Ms. Jing Wang , JIACO Instruments B.V., Delft, Netherlands
Johannes Bruckmeier , Infineon Technologies Munich, Neubiberg, Germany
Ms. Claudia Keller , Infineon Technologies Munich, Neubiberg, Germany
Genny V. Dela Cruz , Infineon Technologies Singapore, Kallang Sector, Singapore
Prof. Kees Beenakker , Delft University of Technology, Delft, Netherlands