MEMS Failure Analysis In Wafer Fabrication
MEMS Failure Analysis In Wafer Fabrication
Wednesday, November 9, 2016
Summary:
This paper discussed how failure analysis takes into place to identify failure on MEMS device neither on MEMS cap or CMOS chip. Challenges faced and how to resolve the problem especially to identify particle contamination for MEMS.
This paper discussed how failure analysis takes into place to identify failure on MEMS device neither on MEMS cap or CMOS chip. Challenges faced and how to resolve the problem especially to identify particle contamination for MEMS.