Imaging of Strain from Deep Trenches using X-Ray Diffraction Imaging (XRDI)
Monday, November 7, 2016: 8:25 AM
121AB (Fort Worth Convention Center)
Mr. Jeff Gambino
,
ON Semiconductor, Gresham, OR
Y. Watanabe
,
ON Semiconductor, Oizumi-machi, Japan
Y. Kanuma
,
ON Semiconductor, Oizumi-machi, Japan
B. Greenwood
,
ON Semiconductor, Gresham, OR
D. Price
,
ON Semiconductor, Gresham, OR
A. Suwhanov
,
ON Semiconductor, Gresham, OR
S. Hose
,
ON Semiconductor, Gresham, OR
O. Whear
,
Bruker, Durham, United Kingdom