42nd International Symposium for Testing and Failure Analysis (November 6-10, 2016)
November 06 - 10, 2016
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Mr. Yinzhe Ma
Senior Engineer
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020
Papers:
Conductive Thin Film Fail Detection in 20 nm and 14nm technologies
Process Flow employed for Parametric Test Structure Chain Opens Fault Isolation in 20 nm and sub-20 nm technologies in high throughput Foundries