42nd International Symposium for Testing and Failure Analysis (November 6-10, 2016)
November 06 - 10, 2016
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Mr. Oskar Amster
PrimeNano, Inc.
Palo Alto, CA
USA 94306
Papers:
Device Dielectric Quality analysis and Fault Isolation at the contact level by scanning Microwave Impedance Microscopy
INVITED TALK: Survey of common AFM electrical modes used in semiconductor Failure Analysis with further discussion of novel electrical modes that extend the capabilities for high resolution device characterization