Dr. Felix Beaudoin

PMTS
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020

Papers:

Process Flow employed for Parametric Test Structure Shorts Fault Isolation in sub-22 nm technologies in high throughput Foundries
Nanoprobing Beyond 14nm with Latest Generation SEM-based Nano-probers
EBAC for Isolating Partially-Localized FEOL Electrical Shorts on Test Structures During Sub-14nm Technology Development