Investigating Root Cause of a Bubble Formation in Spin on Hardmask

Wednesday, October 31, 2018
Dr. Rebecca D. Dar , GLOBALFOUNDRIES, Malta, NY
Jason Behnke , GLOBALFOUNDRIES, Malta, NY
Frieder Baumann , GLOBALFOUNDRIES, Malta, NY
Timothy Shepherd , GLOBALFOUNDRIES, Malta, NY
Kok Hin (Rick) Teo , GLOBALFOUNDRIES, Malta, NY
Wayne Zhao , GLOBALFOUNDRIES, Malta, NY
Joshua Moore , GLOBALFOUNDRIES, Malta, NY
Laurent Dumas , GLOBALFOUNDRIES, Malta, NY

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