A discussion of dielectric film deformation by E-beam energy

Wednesday, October 31, 2018
Ms. Yu-Xiu Chen , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Ms. Pei-Ning Hsu , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Ms. Yu-Min Chung , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Dr. Hsin-Cheng Hsu , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Mr. Huai-San Ku , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Mr. Chin-Chih Yeh , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Mr. Nan-Tzu Lian , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Mr. Ta-Hone Yang , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Mr. Kuang-Chao Chen , Macronix International Co., Ltd., Hsin-Chu, Taiwan
Dr. Chih-Yuan Lu , Macronix International Co., Ltd., Hsin-Chu, Taiwan

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