Identifying the Root Cause of Source-Drain Leakage Caused Soft Fail in Advanced Bulk FinFET Devices

Wednesday, October 31, 2018: 1:30 PM
225AB (Phoenix Convention Center)
Mr. Liangshan Chen , GLOBALFOUNDRIES, Malta, NY
Dr. Yuting Wei , GLOBALFOUNDRIES, Malta, NY
Ms. Tanya Schaeffer , GLOBALFOUNDRIES, Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES, Malta, NY

See more of: Nanoprobing and Electrical Characterization I
See more of: Technical Program