Nanoprobing and Electrical Characterization I

Wednesday, October 31, 2018: 1:30 PM-2:20 PM
225AB (Phoenix Convention Center)
Mr. John Sanders, DCG Systems and Ms. Sweta Pendyala, Globalfoundries
1:30 PM
Identifying the Root Cause of Source-Drain Leakage Caused Soft Fail in Advanced Bulk FinFET Devices
Mr. Liangshan Chen, GLOBALFOUNDRIES; Dr. Yuting Wei, GLOBALFOUNDRIES; Ms. Tanya Schaeffer, GLOBALFOUNDRIES; Mr. Chong Khiam Oh, GLOBALFOUNDRIES
1:55 PM
Analysis of induced end-of-life failures in SRAM through nanoprobing
Mr. Oberon St John Dixon-Luinenburg, Thermo Fisher Scientific; Mr. Jordan Fine, PhD, Thermo Fisher Scientific
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