Identification of Defective Fin by E-beam Induced Current in Advanced FinFET Device Failure Analysis

Thursday, November 1, 2018: 9:50 AM

225AB (Phoenix Convention Center)

Dr. Yuting wei , GLOBALFOUNDRIES Inc., Malta, NY

Dr. Chuan Zhang , GLOBALFOUNDRIES Inc., Malta, NY

Mr. Liangshan Chen , GLOBALFOUNDRIES Inc., Malta, NY

Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY

See more of: Microscopy II
See more of: Technical Program