Die-Level Scanning Capacitance Microscopy Fault Isolation on SOI Fin-FET Devices for Advanced Semiconductor Nodes

Monday, October 29, 2018: 2:15 PM
226BC (Phoenix Convention Center)
Dr. Lucile C. Teague Sheridan, Ph.D. , GLOBALFOUNDRIES Inc., Malta, NY
Ms. Tanya Schaeffer , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Yuting Wei , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Satish Kodali , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , GLOBALFOUNDRIES Inc., Malta, NY

See more of: Scanning Probe Analysis I
See more of: Technical Program