EBAC analysis with Chemically Enhanced FIB Milling Assists Technique on large Kerf/PCM Test Structure

Thursday, November 1, 2018: 2:20 PM
226BC (Phoenix Convention Center)
Mr. Huei Hao Yap , Globalfoundries, Malta, NY
Mr. Chong Khiam Oh , Globalfoundries Inc. Malta, NY USA, Malta, NY