FIB Circuit Analysis and Edit

Thursday, November 1, 2018: 1:30 PM-2:45 PM
226BC (Phoenix Convention Center)
Dr. Shida Tan, Intel Corporation and Dr. Ken Lagarec, Fibics Incorporated
1:30 PM
Novel Approach of Improving Secondary Electron Detector in FIB System
Dr. Steve Wang, Thermo Fisher Scientific; Jim McGinn, Thermo Fisher Scientific; Peter Tvarozek, Thermo Fisher Scientific; Mr. Amir Weiss, Thermo Fisher Scientific
1:55 PM
FIB Based sample preparation for localized SCM and SSRM
Dr. Frederic Lorut, STMicroelectronics; Dr. Alexia Valery, STMicroelectronics; Dr. Nicolas Chevalier, CEA; Dr. Denis Mariolle, CEA
2:20 PM
EBAC analysis with Chemically Enhanced FIB Milling Assists Technique on large Kerf/PCM Test Structure
Mr. Huei Hao Yap, Globalfoundries; Mr. Chong Khiam Oh, Globalfoundries Inc. Malta, NY USA
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