Low-energy Ar ion milling of FIB TEM specimens from 14 nm and future FinFET technologies

Thursday, November 1, 2018: 8:50 AM
226BC (Phoenix Convention Center)
Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA
Dr. Pawel Nowakowski , E.A. Fischione Instruments, Inc., Export, PA
Dr. Michael J. Campin , E.A. Fischione Instruments, Inc., Export, PA
Ms. Mary Ray , E.A. Fischione Instruments, Inc., Export, PA
Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA

See more of: FIB Sample Preparation
See more of: Technical Program