Automated Contactless Defect Analysis Technique using Computer Vision

Monday, October 29, 2018: 10:20 AM
120A (Phoenix Convention Center)
Dr. Franco Stellari , IBM Research, Yorktown Heights, NY
Dr. Chung-Ching Lin , IBM T.J. Watson Research Center, Yorktown Heights, NY
Mr. Thomas Wassick , IBM Systems, 2070 ROUTE 52 HOPEWELL JUNCTION, NY
Tom Shaw , IBM Research, Yorktown Heights, NY
Dr. Peilin Song , IBM T.J. Watson Research Center, Yorktown Heights, NY

Summary:

In this paper, an automated contactless defect analysis technique using Computer Vision (CV) algorithms is presented. The proposed method includes closed-loop control of optical tools for automated image collection, as well as advanced image analysis methods to improve image quality and detect potential defects. As an example, the technique was successfully used to identify delamination defects along the perimeter of a large test chip.