Characterizing interlayer sub-m features in microelectronics devices using high resolution scanning probe-IR spectroscopy and imaging

Wednesday, October 31, 2018
Dr. Anirban Roy , Bruker Nano Surfaces, Santa Barbara, CA
Qichi Hu , Bruker Nano Surfaces, Santa Barbara, CA
Honghua Yang , Bruker Nano Surfaces, Santa Barbara, CA
Peter De Wolf , Bruker Nano Surfaces, Santa Barbara, CA
Sean King , Intel Corporation, Hillsboro, OR

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