Scanning Probe Analysis - POSTER

Wednesday, October 31, 2018: 2:20 PM-4:20 PM
Dr. Paiboon Tangyunyong, Sandia National Laboratories and Mr. Phil Kaszuba, Globalfoundries
Finite Element Modeling and Quantitative Measurement using sMIM to Characterize Low k Dielectric Films
Mr. Kurt Rubin, PrimeNano, Inc.; Mr. Warren Jolley, PrimeNano, Inc.
Characterizing interlayer sub-m features in microelectronics devices using high resolution scanning probe-IR spectroscopy and imaging
Dr. Anirban Roy, Bruker Nano Surfaces; Qichi Hu, Bruker Nano Surfaces; Honghua Yang, Bruker Nano Surfaces; Peter De Wolf, Bruker Nano Surfaces; Sean King, Intel Corporation
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