Novel Approach of Improving Secondary Electron Detector in FIB System
Novel Approach of Improving Secondary Electron Detector in FIB System
Thursday, November 1, 2018: 1:30 PM
226BC (Phoenix Convention Center)
Summary:
Efficient secondary electron detector for advanced IC circuit edit FIB systems have been developed and optimized. Results will be presented to show enhanced secondary electron collection efficiency and more importantly the end-pointing capability.
Efficient secondary electron detector for advanced IC circuit edit FIB systems have been developed and optimized. Results will be presented to show enhanced secondary electron collection efficiency and more importantly the end-pointing capability.