Beam-based localization using electrons: EBIRCH overview

Monday, October 29, 2018: 1:00 PM
225AB (Phoenix Convention Center)
Mr. Gregory M. Johnson , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Christopher D'Aleo , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Zaheer Khan , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Michael Iwatake , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Brian Yates , GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Ahmad Katnani , GLOBALFOUNDRIES Inc., Hopewell Junction, NY

Summary:

This paper explores the beam-based nature of the technique and uses understanding from another beam-based technique, Optical Beam Induced Resistance CHange (OBIRCH), to propose a dominant mechanism. This mechanism may explain the widely different success rates between different types of samples observed after six month’s use of the technique for isolations on large health of line structures in a failure analysis lab.
See more of: Fault Isolation
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