Scanning Probe Analysis II

Monday, October 29, 2018: 3:25 PM-4:15 PM

226BC (Phoenix Convention Center)

Dr. Paiboon Tangyunyong, Sandia National Laboratories and Mr. Phil Kaszuba, Globalfoundries

3:25 PM

Spectroscopy based mapping with scanning Microwave Impedance Microscopy
Dr. Peter De Wolf, Bruker Nano Surfaces; Dr. Zhuangqun Huang, Bruker Nano Surfaces; Dr. Bede Pittenger, Bruker Nano Surfaces

3:50 PM

Conductive-AFM for Inline Voltage Contrast Defect Characterization at Advanced Technology Nodes
Dr. Chuan Zhang, GLOBALFOUNDRIES Inc.; Dr. Jochonia Nxumalo, GLOBALFOUNDRIES Inc.; Ms. Esther P.Y. Chen, GLOBALFOUNDRIES Inc.

See more of: Technical Program