Nanoprobing and EBAC for Improving Failure Analysis Success Rates on Sub-14nm Logic and SRAM
Nanoprobing and EBAC for Improving Failure Analysis Success Rates on Sub-14nm Logic and SRAM
Wednesday, October 31, 2018: 4:20 PM
225AB (Phoenix Convention Center)
Summary:
Nanoprobing, electrical probing on a microscopic scale, and EBAC, a high-resolution, static technique, can be used for isolating defects and improving failure analysis success rates on both logic and SRAM devices. This paper presents three case studies of subtle defects on a technology beyond 14nm that may not have been successful without the use of one or both of these techniques.
Nanoprobing, electrical probing on a microscopic scale, and EBAC, a high-resolution, static technique, can be used for isolating defects and improving failure analysis success rates on both logic and SRAM devices. This paper presents three case studies of subtle defects on a technology beyond 14nm that may not have been successful without the use of one or both of these techniques.