ESREF 2017 Outstanding Paper: Temperature accelerated discharging processes through the bulk of PECVD silicon nitride films for MEMS capacitive switches, M. Koutsoureli, N. Siannas and G. Papaioannou
ESREF 2017 Outstanding Paper: Temperature accelerated discharging processes through the bulk of PECVD silicon nitride films for MEMS capacitive switches, M. Koutsoureli, N. Siannas and G. Papaioannou
Monday, October 29, 2018: 8:15 AM
120A (Phoenix Convention Center)