44th International Symposium for Testing and Failure Analysis (Oct. 28 - Nov. 1, 2018)
October 28 - November 01, 2018
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Ms. Tanya Schaeffer
GLOBALFOUNDRIES
Malta, NY
USA 12020
Papers:
Identifying the Root Cause of Source-Drain Leakage Caused Soft Fail in Advanced Bulk FinFET Devices
Application of Novel Low Current OBIRCH Amplifier and Nanoprobing to identify subtle Leakages in Advanced Node Technologies
Die-Level Scanning Capacitance Microscopy Fault Isolation on SOI Fin-FET Devices for Advanced Semiconductor Nodes