Ms. Esther P.Y. Chen

Manager
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020

Papers:

Conductive-AFM for Inline Voltage Contrast Defect Characterization at Advanced Technology Nodes
Nanoprobing and EBAC for Improving Failure Analysis Success Rates on Sub-14nm Logic and SRAM
OBIRCH for Isolating High and Low Resistance Test Structure Failures During Sub-14nm Technology Development
Overcoming the challenges of parallel, SRAM Shorts test structures with EBIRCH