Mr. Liangshan Chen

GLOBALFOUNDRIES
Malta, NY
USA 12020

Papers:

Identifying the Root Cause of Source-Drain Leakage Caused Soft Fail in Advanced Bulk FinFET Devices
Identification of Defective Fin by E-beam Induced Current in Advanced FinFET Device Failure Analysis
Application of Novel Low Current OBIRCH Amplifier and Nanoprobing to identify subtle Leakages in Advanced Node Technologies